Hybrid data mining approach for pattern extraction from ...
Hybrid data mining approach for pattern extraction from wafer bin map to improve yield in semiconductor manufacturing ShaoChung Hsu, ChenFu Chien Department of Industrial Engineering Engineering Management, National Tsing Hua University, Hsinchu 30043, Taiwan, ROC Received 16 September 2005; accepted 25 May 2006 Available online 4 December 2006